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Experimental observation of the transition from nonlocal to local kineticsin inductively coupled plasma
- 제목
- Experimental observation of the transition from nonlocal to local kineticsin inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2009-10-20
- 학회명
- 62th Gaseous Electronics Conference
- 개최지
- saratoga springs, NY U.S.A