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Molecular Layer Deposition of Hybrid Films Using Diethylzinc and Benzenetriol
- 제목
- Molecular Layer Deposition of Hybrid Films Using Diethylzinc and Benzenetriol
- 저자
- 성명모
- 발행일
- 2010-06-21
- 학회명
- 10th International Conference on Atomic Layer Deposition
- 개최지
- seoul education culture center