Plasma characteristics in a solenoidal inductive/capacitive discharge under a weak dc magnetic field

초록

Plasma parameters such as electron temperatures, plasma potentials, and plasma densities in a solenoidal inductive/capacitive discharge immersed in a weak dc magnetic field are investigated by measuring electron energy distribution functions (EEDF). Measured EEDFs in a dc magnetic field show the typical characteristics of the local electron kinetics. The magnetic field reduces the heat flow to the electrons at the discharge center while it heats up the electrons at the discharge radial boundary. The change in the plasma potential with respect to the magnetic field at various radial positions is also discussed. It is found that the radial profile of the plasma density predominately changes with varying the magnetic field, and the magnetic field can be used to control the radial uniformity of the plasma density in the solenoidal inductive/capacitive discharge.

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