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Distributed Ferromagnetic ICP as an alternative plasma processing tool
- 제목
- Distributed Ferromagnetic ICP as an alternative plasma processing tool
- 저자
- 정진욱
- 발행일
- 2006-01-24
- 학회명
- 6th International Conference on Reactive plasmas
- 개최지
- Matsushima/sendai,JAPAN