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The Electrical Characteristics of ALD Si-doped HfO2 Ferroelectric FET Device

제목
The Electrical Characteristics of ALD Si-doped HfO2 Ferroelectric FET Device
저자
최창환
발행일
2022-01-25
학회명
한국반도체학술대회
개최지
강원도 하이원 그랜드 호텔

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