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Plasma non-uniformity by RF bias power in inductively coupled plasma
- 제목
- Plasma non-uniformity by RF bias power in inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2010-07-04
- 학회명
- The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma S
- 개최지
- Jeju, Korea