The 10th Asia-Pacific conference on Plasma Science and Technology (APCPST 2010): The 153rd symposium on Plasma Science for Materials (SPSM 2010)

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The 10th Asia-Pacific conference on Plasma Science and Technology (APCPST 2010): The 153rd symposium on Plasma Science for Materials (SPSM 2010)
저자
Chae, H.Y.Chung, Chin WookChung, J.W.Hong, M.P.Joo, J.H.Kim, H.J.Kim, D.H.Kusano, E.Overzet, L.Pu, Y.-K.Setsuhara, Y.Shi, J.J.Terashima, K.Watanabe, T.
DOI
10.1016/j.tsf.2011.06.001
발행일
2011-08
유형
Editorial
저널명
Thin Solid Films
519
20
페이지
6637 ~ 6638