Influence of Oxygen Profile in ALD HfO2-x Thin Films on Non-Volatile Resistive Switching Behaviors with a Ti/HfOx/Pt Structure

제목
Influence of Oxygen Profile in ALD HfO2-x Thin Films on Non-Volatile Resistive Switching Behaviors with a Ti/HfOx/Pt Structure
저자
최창환
발행일
2017-07-03
학회명
Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Device (AWAD)
개최지
Gyeongju, Korea