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Experimental measurement of plasma parameters and electron energy distribution in ferrite-core side type Ar/He inductively coupled plasma
- 제목
- Experimental measurement of plasma parameters and electron energy distribution in ferrite-core side type Ar/He inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2012-10-22
- 학회명
- 65th Gaseous Electronics Conference
- 개최지
- Austin