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Langmuir probe perturbation in inductively coupled plasmas
- 제목
- Langmuir probe perturbation in inductively coupled plasmas
- 저자
- 정진욱
- 발행일
- 2008-08-18
- 학회명
- 1st International conference on microelectronics and plasma technology
- 개최지
- Jeju Ramada Plaza Hotel