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Collisionless electron heating and control of electron energy distribution by adding pulsed inductive fields in capacitively coupled plasma
- 제목
- Collisionless electron heating and control of electron energy distribution by adding pulsed inductive fields in capacitively coupled plasma
- 저자
- 정진욱
- 발행일
- 2012-07-04
- 학회명
- 4th ICMAP
- 개최지
- 제주도