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High-Speed RF/Plasma Diagnostic and Control Technology in Plasma Enhanced Atomic Layer Deposition (PEALD) Process
- 제목
- High-Speed RF/Plasma Diagnostic and Control Technology in Plasma Enhanced Atomic Layer Deposition (PEALD) Process
- 저자
- 정진욱
- 발행일
- 2015-03-30
- 학회명
- 7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- 개최지
- Nagoya University, Nagoya, Japan