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Comparison of power transfer eciency and plasma parameters of series and parallel antennas in inductively coupled plasmas
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- Comparison of power transfer eciency and plasma parameters of series and parallel antennas in inductively coupled plasmas
- 저자
- 정진욱
- 발행일
- 2017-11-07
- 학회명
- 70th Annual Gaseous Electronics Conference
- 개최지
- Pittsburgh, Pennsylvania