3D Gate-All-Around FeFET using Zr-doped HfO2 and Indium Gallium Oxide

제목
3D Gate-All-Around FeFET using Zr-doped HfO2 and Indium Gallium Oxide
저자
최창환
발행일
2023-07-26
학회명
International Conference on Atomic Layer Deposition
개최지
Bellevue, Washington, USA