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Effect of RF bias frequency and gas pressure on discharge mode transition in an inductively coupled plasma
- 제목
- Effect of RF bias frequency and gas pressure on discharge mode transition in an inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2018-11-07
- 학회명
- Gaseous Electronics Conference
- 개최지
- Oragon convention center, Portland