Controlled Growth of ZnO/TiO2 Nanocables by Using Atomic Layer Deposition

초록

We have been studied the fabrication of nanocables by using atomic layer deposition (ALD) with a nanoporous membrane as a template. The TiO2 nanotubes were formed inside the polycarbonate (PC) template or anodic aluminum oxide (AAO) by using atomic layer deposition (ALD) from Titanium isopropoxide (TIP) and H2O. Due to the excellent coatings of the ALD process, the wall thickness of the oxide nanotubes and thus the inner diameter of the tubes could be controlled. ZnO deposited with Diethyl Zinc (DEZn) and water inside TiO2 nanotubes. The ZnO/TiO2 nanocables have been investigated by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).