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Suppressed Charge Trapping Behaviors of ALD HfAlOx GaN MOS Devices with Sulfur Passivation

제목
Suppressed Charge Trapping Behaviors of ALD HfAlOx GaN MOS Devices with Sulfur Passivation
저자
최창환
발행일
2016-02-24
학회명
한국반도체학술대회
개최지
하이원리조트

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