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Bias waveform adjustment to substrate for mono-energetic ion energy distribution
- 제목
- Bias waveform adjustment to substrate for mono-energetic ion energy distribution
- 저자
- 정진욱
- 발행일
- 2024-10-01
- 학회명
- 77th Gaseous Electronics Conference (2024 GEC)
- 개최지
- Double Tree by Hilton San Diego Mission Valley, San Diego, California.