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Method for the measurement of transferred power to plasma in inductive discharges (vol 547, pg 9, 2013)
- Hwang, Hye-Ju;
- Kim, Young-Cheol;
- Chung, Chin-Wook
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- Method for the measurement of transferred power to plasma in inductive discharges (vol 547, pg 9, 2013)
- 저자
- Hwang, Hye-Ju; Kim, Young-Cheol; Chung, Chin-Wook
- 발행일
- 2014-01
- 유형
- Correction
- 저널명
- Thin Solid Films
- 권
- 551
- 페이지
- 206 ~ 206