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Control of spatial plasma density distribution using parallel capacitor in an inductively coupled plasma
- 제목
- Control of spatial plasma density distribution using parallel capacitor in an inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2023-08-11
- 학회명
- 76th Gaseous Electronics Conference
- 개최지
- Michigan League, Ann Arbor, MI