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Effect of DC biased grid on the oxygen inductively coupled plasma
- 제목
- Effect of DC biased grid on the oxygen inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2024-06-05
- 학회명
- 21th International Symposium on the Physics of Semiconductors and Applications
- 개최지
- Ramada Plaza Jeju Hotel, Korea