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Spatial distribution of floating potiential at wafer level in inductively coupled plasmas
- 제목
- Spatial distribution of floating potiential at wafer level in inductively coupled plasmas
- 저자
- 정진욱
- 발행일
- 2015-10-14
- 학회명
- 68th Annual Gaseous Electronics Conference
- 개최지
- Honolulu, Hawaii, US