Vapor-Phase Fabrication of Organic-Inorganic Hybrid Thin Films Using Moleqular Layer Deposition with Atomic Layer Deposition

제목
Vapor-Phase Fabrication of Organic-Inorganic Hybrid Thin Films Using Moleqular Layer Deposition with Atomic Layer Deposition
저자
성명모
발행일
2011-11-02
학회명
AVS 58th International Symposium & Exhibition
개최지
Nashville Convention Center