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Vapor-Phase Fabrication of Organic-Inorganic Hybrid Thin Films Using Moleqular Layer Deposition with Atomic Layer Deposition
- 제목
- Vapor-Phase Fabrication of Organic-Inorganic Hybrid Thin Films Using Moleqular Layer Deposition with Atomic Layer Deposition
- 저자
- 성명모
- 발행일
- 2011-11-02
- 학회명
- AVS 58th International Symposium & Exhibition
- 개최지
- Nashville Convention Center