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Experimental observation of transit time resonance heating through electron energy distribution function measurement in a low pressure inductively coupled plasma
- 제목
- Experimental observation of transit time resonance heating through electron energy distribution function measurement in a low pressure inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2014-11-05
- 학회명
- 67th Annual Gaseous Electronics Conference
- 개최지
- Raleigh, NC