The Electron temperature measurement by using an optical emission spectroscopy in inductive Ar/O2 mixture discharge

제목
The Electron temperature measurement by using an optical emission spectroscopy in inductive Ar/O2 mixture discharge
저자
정진욱
발행일
2009-10-20
학회명
62th Gaseous Electronics Conference
개최지
saratoga springs, NY U.S.A