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Interpolation for two-dimensional spatial distribution estimation of plasma densities in a cylindrical RF discharge reactor
- 제목
- Interpolation for two-dimensional spatial distribution estimation of plasma densities in a cylindrical RF discharge reactor
- 저자
- 정진욱
- 발행일
- 2012-07-04
- 학회명
- 4th ICMAP
- 개최지
- 제주도