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Work-Function Modulation and Electrical Stress Immunity of Fully Depleted SOI (FDSOI) Tunnel Field Effect Transistor (TFET) with Plasma Enhanced Atomic Layer Deposited (PEALD) TiN Gate Electrode
- 제목
- Work-Function Modulation and Electrical Stress Immunity of Fully Depleted SOI (FDSOI) Tunnel Field Effect Transistor (TFET) with Plasma Enhanced Atomic Layer Deposited (PEALD) TiN Gate Electrode
- 저자
- 최창환
- 발행일
- 2018-07-12
- 학회명
- Nano Korea 2018
- 개최지
- KINTEX, ILSAN, Korea