Work-Function Modulation and Electrical Stress Immunity of Fully Depleted SOI (FDSOI) Tunnel Field Effect Transistor (TFET) with Plasma Enhanced Atomic Layer Deposited (PEALD) TiN Gate Electrode

제목
Work-Function Modulation and Electrical Stress Immunity of Fully Depleted SOI (FDSOI) Tunnel Field Effect Transistor (TFET) with Plasma Enhanced Atomic Layer Deposited (PEALD) TiN Gate Electrode
저자
최창환
발행일
2018-07-12
학회명
Nano Korea 2018
개최지
KINTEX, ILSAN, Korea