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Response to "Comment on 'A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma'" [Phys. Plasmas 28, 064701 (2021)]
- Kim, Young-Cheol;
- Kim, Hyun-Jun;
- Lee, Hyo-Chang;
- Chung, Chin-Wook
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- Response to "Comment on 'A study on improvement of discharge characteristic by using a transformer in a capacitively coupled plasma'" [Phys. Plasmas 28, 064701 (2021)]
- 저자
- Kim, Young-Cheol; Kim, Hyun-Jun; Lee, Hyo-Chang; Chung, Chin-Wook
- 발행일
- 2021-05
- 유형
- Letter
- 권
- 28
- 호
- 6
- 페이지
- 1 ~ 1