상세 보기
On high efficiency plasma generation using antenna impedance tuning in an inductively coupled plasma
- 제목
- On high efficiency plasma generation using antenna impedance tuning in an inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2024-11-13
- 학회명
- Korean international semiconductor conference on manufacturing technology 2024
- 개최지
- Paradise Hotel Busan