Intergrated Optimization of Plasma Activation and Bonding Conditions for SiO2-Cu Hybrid Bonding

제목
Intergrated Optimization of Plasma Activation and Bonding Conditions for SiO2-Cu Hybrid Bonding
저자
김학성
발행일
2026-04-02
학회명
KMEPS 2026 정기학술대회
개최지
송도컨벤시아, 인천