Experimental investigation on the hysteresis in low-pressure inductively coupled neon discharge

초록

A hysteresis phenomenon observed in neon inductive discharge at low gas pressure is investigated in terms of the evolution of the electron energy distribution function (EEDF). Generally, the hysteresis phenomenon has been reported at high-pressure Ramsauer gas discharges. However, in neon plasma, we found that the hysteresis phenomenon occurs even at low gas pressure (5 mTorr). Furthermore, the hysteresis vanishes with an increase in the gas pressure (10 and 25 mTorr). To analyze this hysteresis, the EEDF is measured depending on the radio frequency power. The EEDF at 10 mTorr sustains the bi-Maxwellian distribution during an E-H transition. On the other hand, the EEDF at 5 mTorr changes dramatically between discharge modes. At 5 mTorr, the measured EEDF for the E mode has the Maxwellian distribution due to high collisional heating in the bulk plasma. The EEDF for the H mode has the bi-Maxwellian distribution because collisionless heating in the skin depth is dominant. This apparent evolution of the EEDF causes a nonlinear energy loss due to collisions during the discharge mode transition. Therefore, the plasma can maintain the H mode discharge with high ionization efficiency, even at a lower applied power, which results in the hysteresis.

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