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Damage-free plasma processing of EUV metal-oxide resists using a novel plasma source
- 제목
- Damage-free plasma processing of EUV metal-oxide resists using a novel plasma source
- 저자
- 정진욱
- 발행일
- 2026-02-25
- 학회명
- SPIE Advanced Lithography + Patterning 2026
- 개최지
- San Jose McEnery Convention Center, San Jose, CA, USA