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Electron temperature control by an external magnetic field in solenoidal inductive discharge
- Lee, Min-Hyong;
- Ku, Ju-Hwan;
- Hwang, Kwang-Tae;
- Chung, Chin-Wook
Citations
WEB OF SCIENCE
3Citations
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3초록
Electron temperature control is performed by controlling the external magnetic field strength in a solenoidal inductive discharge. As the magnetic field strength increases, the electron temperature of the plasma bulk decreases. The temperature at the discharge center falls from 3.1 to 1.5 eV when a 52 G dc magnetic field is applied. This decrease in the temperature is accompanied by a decrease in the plasma density. The change in temperature by the magnetic field is caused by both the electron confinement and the restriction of electron transport by the magnetic field in solenoidal inductive discharge.
키워드
discharges (electric); plasma density; plasma temperature; COLD ELECTRONS; PLASMA SOURCE; BIAS
- 제목
- Electron temperature control by an external magnetic field in solenoidal inductive discharge
- 저자
- Lee, Min-Hyong; Ku, Ju-Hwan; Hwang, Kwang-Tae; Chung, Chin-Wook
- 발행일
- 2009-06
- 유형
- Article
- 권
- 16
- 호
- 6
- 페이지
- 1 ~ 5