Low Gate Leakage Current and Interface State Density of ALD Al2O3 SiC MOS Device with NH3 Plasma Treatment

제목
Low Gate Leakage Current and Interface State Density of ALD Al2O3 SiC MOS Device with NH3 Plasma Treatment
저자
최창환
발행일
2015-06-25
학회명
International Forum on Functional Materials (IFFM)
개최지
Ramada Plaza Jeju