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Control of NF3 dissociation in an inductively coupled plasma with a DC bias grid
- 제목
- Control of NF3 dissociation in an inductively coupled plasma with a DC bias grid
- 저자
- 정진욱
- 발행일
- 2025-02-26
- 학회명
- SPIE Advanced Lithography + Patterning 2025
- 개최지
- San Jose, California, US