Experimental observation of the plasma potential with the screening temperature

초록

An experimental investigation of the Boltzmann relation in the plasma bulk region and the presheath region was performed at low pressure inductively coupled plasma with bi-Maxwellian distribution. The spatial profiles of the electron energy distribution function (EEDF) were measured from the discharge center to the plasma boundary with an ion mean free path scale. The screening temperature was derived from the Einstein relation and the bi-Maxwellian EEDFs, and it has the same expression as the electron temperature in the ion directed velocity to the sheath edge in plasmas with the bi-Maxwellian EEDFs. Radial variations of the ambipolar potential and the presheath potential were calculated with the screening temperature and compared with the obtained value from the spatially measured EEDFs. It was shown that the ambipolar potential and the presheath potential are governed by the screening temperature.

키워드