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Low energy electron heating and evolution of the electron energy distribution by diluted O2 in a planar inductive Ar/O2 mixture discharge
- 제목
- Low energy electron heating and evolution of the electron energy distribution by diluted O2 in a planar inductive Ar/O2 mixture discharge
- 저자
- 정진욱
- 발행일
- 2009-09-23
- 학회명
- 2nd International Conference on Microelectronics and Technology
- 개최지
- Busan, Korea