Vapor-Phase Fabrication of Organic-Inorganic Nanohybrid Thin Films using Molecular Layer Deposition with Atomic Layer Deposition

제목
Vapor-Phase Fabrication of Organic-Inorganic Nanohybrid Thin Films using Molecular Layer Deposition with Atomic Layer Deposition
저자
성명모
발행일
2013-08-20
학회명
Multiscale Energy Global Frontiers Workshop 2013
개최지
서울대학교