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On the compensation method of the attenuation of the light intensities in fluorocarbon plasmas
- 제목
- On the compensation method of the attenuation of the light intensities in fluorocarbon plasmas
- 저자
- 정진욱
- 발행일
- 2024-11-07
- 학회명
- 70th American Vacuum Society
- 개최지
- Tampa Convention center