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High time-resolution spatial distribution measurement of the ion flux and the electron temperature in an inductively coupled plasma
- 제목
- High time-resolution spatial distribution measurement of the ion flux and the electron temperature in an inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2016-10-11
- 학회명
- 69th Annual Gaseous Electronics Conference
- 개최지
- Bochum, Germany