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Correlation of plasma impedance and plasma parameters in inductively coupled Ar and CF4 plasma
- 제목
- Correlation of plasma impedance and plasma parameters in inductively coupled Ar and CF4 plasma
- 저자
- 정진욱
- 발행일
- 2020-10-05
- 학회명
- APS Gaseous Electronics Conference 2020
- 개최지
- 온라인