Synergic Comlinations of Organic and Inorganic Nanolayers Using Molecular Layer Deposition with Atomic Layer Deposition

제목
Synergic Comlinations of Organic and Inorganic Nanolayers Using Molecular Layer Deposition with Atomic Layer Deposition
저자
성명모
발행일
2012-06-19
학회명
12th International Conference on Atomic Layer Deposition
개최지
Dresden