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Charge-Free Plasma Processing Using Ultra-Low Electron Temperature Plasma for Atomic Scale Semiconductor Devices
- 제목
- Charge-Free Plasma Processing Using Ultra-Low Electron Temperature Plasma for Atomic Scale Semiconductor Devices
- 저자
- 정진욱
- 발행일
- 2024-11-13
- 학회명
- Korean international semiconductor conference on manufacturing technology 2024
- 개최지
- Paradise Hotel Busan