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"MOS Device VFB Shift Using Oxygen Modulation within PVD and PEALD TiN Gate Electrode
- 제목
- "MOS Device VFB Shift Using Oxygen Modulation within PVD and PEALD TiN Gate Electrode
- 저자
- 최창환
- 발행일
- 2016-09-27
- 학회명
- The 6th Interntional Conference on Microelectronics and Plasma Technology (ICMAP 2016)
- 개최지
- Gyeongju, Korea