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E-H heating mode transition in high-pressure helium inductively coupled plasma
- 제목
- E-H heating mode transition in high-pressure helium inductively coupled plasma
- 저자
- 정진욱
- 발행일
- 2010-10-04
- 학회명
- 63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas
- 개최지
- Paris, France