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Effect of Nitrogen Addition on Electron Density and Uniformity Enhancement in Oxygen Plasma
- 제목
- Effect of Nitrogen Addition on Electron Density and Uniformity Enhancement in Oxygen Plasma
- 저자
- 정진욱
- 발행일
- 2025-09-23
- 학회명
- AVS 71st International Symposium & Exhibition
- 개최지
- Charlotte Convention Center, Charlotte, North Carolina, USA