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A study on plasma parameters in varions mixed Ar/SF 6 inductively coupled plasmas
- 제목
- A study on plasma parameters in varions mixed Ar/SF 6 inductively coupled plasmas
- 저자
- 정진욱
- 발행일
- 2015-03-27
- 학회명
- 7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- 개최지
- Nagoya University, Nagoya, Japan