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Impact of O3 on the Ferroelectric Properties and Its Time-Dependent Deterioration of ALD HfxZr1-xO2 Thin Film
- 제목
- Impact of O3 on the Ferroelectric Properties and Its Time-Dependent Deterioration of ALD HfxZr1-xO2 Thin Film
- 저자
- 최창환
- 발행일
- 2020-11-04
- 학회명
- The 6th International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE)
- 개최지
- 제주 라마다호텔