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Control of Radical Density through modulation of electron energy probability function in a Dual-Frequency (2 / 27.12 MHz) Inductively Coupled Plasma
- 제목
- Control of Radical Density through modulation of electron energy probability function in a Dual-Frequency (2 / 27.12 MHz) Inductively Coupled Plasma
- 저자
- 정진욱
- 발행일
- 2023-11-08
- 학회명
- 69th American Vacuum Society
- 개최지
- portland, oregon convention center