상세 보기
Ultra-Low Electron Temperature Plasma for Atomic-Scale Semiconductor Processing
- 제목
- Ultra-Low Electron Temperature Plasma for Atomic-Scale Semiconductor Processing
- 저자
- 정진욱
- 발행일
- 2025-11-13
- 학회명
- Korean international semiconductor conference on manufacturing technology 2025
- 개최지
- Paradise Hotel Busan, Busan, Republic of Korea